64-21140C 03-21140-06/F 02-33632-06/C ASM Board Plc Module

64-21140C 03-21140-06/F 02-33632-06/C ASM Board plc module

Product Details

Source materials include SiCl4, SiHCl3, POCl13, GeCl4 and BBr3. Other doping material can

also be controlled, provided that they vaporize with adequate concentration for accurate

ratiodetection. Carrier gases include H2, He, N2, O2 and Ar.

Three outputs are provided : Source (0 to +5VDC); Carrier (0 to +5VDC); Ratio (0 to +5VDC).

These outputs can be monitored with any 5 volt D.C. voltmeter with a sensitivity of 1000

ohms/volt or more. A built-in valve varies the carrier mass flow rate to control the source

gram/min. selected by an external control voltage.

A single small package contains the flowmeter section, ratio detector, control valve and the

electronics.

COMMAND SETTING 0.1 to 5 vdc

OUTPUT INDICATION

1. SOURCE: 0.1-5 vdc linearly proportional to mass flow rate of vaporized liquid

2. CARRIER: 0.1-5 vdc linearly proportional to mass flow rate of carrier gas
3. RATIO: 0.1-5 vdc linearly proportional to ratio of vapor flow (SCCM) to carrier flow (SCCM) scaled with 5 vdc = 50%

Note that when there is no bubbling (i.e. no control) Ratio=0 and Carrier will reach value greater than 5vdc (typically 5.6 volts).

OUTPUT IMPEDANCE: 10 ohms maximum

RIPPLE: 50 mv p-p maximum

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